Focused Ion Beam milling skill for site-specific nanofabrication and cross-section preparation
The FIB Mill Controller skill provides focused ion beam process control for site-specific nanofabrication and sample preparation, enabling precise material removal and deposition at the nanoscale.
TEM Lamella Preparation
Nanofabrication
Circuit Editing
{
"operation": "lamella|milling|deposition|cross_section",
"material": "string",
"target_thickness": "number (nm, for lamella)",
"pattern_file": "string (for milling)",
"beam_voltage": "number (kV)"
}
{
"process_parameters": {
"beam_current": "number (pA)",
"dwell_time": "number (us)",
"overlap": "number (%)"
},
"milling_depth": "number (nm)",
"lamella_thickness": "number (nm)",
"damage_layer": "number (nm)",
"processing_time": "number (minutes)"
}