Nanofabrication metrology skill for process control with CD-SEM, ellipsometry, and profilometry
The Cleanroom Metrology Controller skill provides comprehensive in-line metrology for nanofabrication process control, enabling precise measurement and monitoring of critical dimensions, film thicknesses, and pattern quality.
CD-SEM Measurements
Ellipsometry
Defect Inspection
{
"measurement_type": "cd_sem|ellipsometry|profilometry|defect",
"target_parameter": "string",
"wafer_map": {"sites": "number", "pattern": "string"},
"specification": {
"target": "number",
"tolerance": "number"
}
}
{
"measurements": [{
"site": "string",
"value": "number",
"unit": "string"
}],
"statistics": {
"mean": "number",
"std_dev": "number",
"range": "number"
},
"uniformity": "number (%)",
"pass_fail": "boolean",
"trending_data": {"dates": [], "values": []}
}