Nanoimprint Process Controller

Purpose

The Nanoimprint Process Controller skill provides comprehensive nanoimprint lithography process control, enabling high-throughput nanopatterning through template design, imprint optimization, and defect management.

Capabilities

• Template design and fabrication
• Imprint pressure and temperature optimization
• UV-NIL and thermal NIL protocols
• Demolding force analysis
• Residual layer control
• Defect inspection and yield analysis

Usage Guidelines

NIL Process Control

1. Template Preparation

   • Design with demolding in mind
   • Apply anti-sticking treatment
   • Verify pattern fidelity

2. Imprint Optimization

   • Optimize pressure and temperature
   • Control residual layer thickness