Cleanroom operations skill for managing protocols, contamination control, and process flows
The Cleanroom Protocol Manager skill provides comprehensive management of cleanroom operations for nanofabrication, ensuring protocol compliance, contamination control, and efficient process flows.
Protocol Development
Process Control
Documentation
{
"operation": "create_protocol|update_protocol|track_execution|query_status",
"protocol_id": "string",
"process_type": "lithography|deposition|etch|characterization",
"cleanroom_class": "1|10|100|1000|10000"
}
{
"protocol": {
"id": "string",
"version": "string",
"status": "active|draft|deprecated",
"steps": [{
"step_number": "number",
"description": "string",
"equipment": "string",
"parameters": {}
}]
},
"execution_log": {
"total_runs": "number",
"success_rate": "number (%)",
"last_run": "string"
},
"contamination_status": {
"particle_count": "number",
"classification_met": "boolean"
}
}